TRAY ASSEMBLY AND THIN-FILM DEPOSITION APPARATUS HAVING THE SAME

The present invention relates to a tray assembly and a thin film deposition apparatus having the same. The tray assembly according to the present invention comprises a tray having a substrate mounted, and formed to be moved a certain distance in parallel to the surface where the substrate is mounted...

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Bibliographic Details
Main Authors KIM, SU CHUN, CHA, DONG IL
Format Patent
LanguageEnglish
Korean
Published 03.03.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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