TRAY ASSEMBLY AND THIN-FILM DEPOSITION APPARATUS HAVING THE SAME

The present invention relates to a tray assembly and a thin film deposition apparatus having the same. The tray assembly according to the present invention comprises a tray having a substrate mounted, and formed to be moved a certain distance in parallel to the surface where the substrate is mounted...

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Bibliographic Details
Main Authors KIM, SU CHUN, CHA, DONG IL
Format Patent
LanguageEnglish
Korean
Published 03.03.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to a tray assembly and a thin film deposition apparatus having the same. The tray assembly according to the present invention comprises a tray having a substrate mounted, and formed to be moved a certain distance in parallel to the surface where the substrate is mounted; and a magnet plate formed on the lower part of the tray, and moved by being connected to the tray to pull a mask sheet, and formed to be moved a certain distance in perpendicular to the surface where the substrate is mounted. The purpose of the present invention is to provide the tray assembly enabling vision alignment. 본 발명은 트레이 어셈블리 및 이를 구비한 박막증착장치에 관한 것이다. 본 발명에 따른 트레이 어셈블리는 기판이 안착되며 상기 기판이 안착되는 면과 평행하게 소정거리 이동 가능하게 구비되는 트레이 및 상기 트레이의 하부에 구비되어 상기 마스크시트를 당기도록 상기 트레이와 연동하여 이동하며, 상기 기판이 안착된 면에 대해 수직방향으로 소정거리 이동 가능하게 구비되는 마그넷 플레이트를 구비하는 것을 특징으로 한다.
Bibliography:Application Number: KR20150014832