PLANAR MOTOR AND PROCESSING APPARATUS USING THE SAME

A planar motor of the present invention includes a base unit which one or more stators are arranged; a mover which moves along a magnetic field generated by the stators; a mover supporter which is coupled to the mover, supports the mover against the planar object, and moves the mover by the force of...

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Bibliographic Details
Main Authors KIM, KYOUNG ROCK, AHN, HYEONG JOON
Format Patent
LanguageEnglish
Korean
Published 11.12.2014
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
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Summary:A planar motor of the present invention includes a base unit which one or more stators are arranged; a mover which moves along a magnetic field generated by the stators; a mover supporter which is coupled to the mover, supports the mover against the planar object, and moves the mover by the force of the magnetic field; and a control unit which supplies a control current for the mover and controls the location of the mover.
Bibliography:Application Number: KR20130083765