APPARATUS FOR ENVIRONMENT DATA MONITORING IN SEMICONDUCTOR FABRICATION PROCESS

• Main Authors: KIM, YONG BUM, YOO, WAN OK
• Format: Patent
• Language: English; Korean
• Published: 22.07.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention relates to a safety environment monitoring (SEM) apparatus for a semiconductor fabrication process and, more specifically, to an SEM apparatus for a semiconductor fabrication process to collect various types of environmental safety data required by semiconductor manufacturers. To achieve this, the SEM apparatus for a semiconductor fabrication process includes: an SEM controller to collect the environmental safety data through a sensor, which is provided in a semiconductor fabrication process to collect environmental safety data, and a first protocol; a computer integrated manufacturing to collect the environmental safety data by the SEM controller and a second protocol, and converting the collected environmental safety data to any one of SECS, GEM, and HSMS, which are standardized third protocols; and a server to collect the environmental safety data through the computer integrated manufacturing and the third protocol.