METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
The present invention relates to a method for manufacturing an electrostatic chuck and, more specifically, to a method for manufacturing an electrostatic chuck comprising a first step of arranging first and second aluminum nitride (AIN) substrates on which molybdenum contact terminals are inserted o...
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Main Authors | , , , |
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Format | Patent |
Language | English Korean |
Published |
19.05.2014
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Subjects | |
Online Access | Get full text |
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