THIN FILM DEPOSITION APPARATUS
The present invention relates to a thin film deposition apparatus. According to the present invention, the thin film deposition apparatus includes: a chamber having a preset space; a substrate support part formed on the chamber to mount a substrate; and a gas supply part formed to relatively move to...
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| Main Author | |
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| Format | Patent |
| Language | English Korean |
| Published |
14.05.2014
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The present invention relates to a thin film deposition apparatus. According to the present invention, the thin film deposition apparatus includes: a chamber having a preset space; a substrate support part formed on the chamber to mount a substrate; and a gas supply part formed to relatively move to the substrate support part, supplies a process gas, and discharges a residual gas. The gas supply part comprises at least one supply channel which supplies the process gas and at least one discharge channel which discharges the residual gas. At least one among the supply channel is formed on the inner side of the discharge channel. |
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| AbstractList | The present invention relates to a thin film deposition apparatus. According to the present invention, the thin film deposition apparatus includes: a chamber having a preset space; a substrate support part formed on the chamber to mount a substrate; and a gas supply part formed to relatively move to the substrate support part, supplies a process gas, and discharges a residual gas. The gas supply part comprises at least one supply channel which supplies the process gas and at least one discharge channel which discharges the residual gas. At least one among the supply channel is formed on the inner side of the discharge channel. |
| Author | YOON, DAE GEUN |
| Author_xml | – fullname: YOON, DAE GEUN |
| BookMark | eNrjYmDJy89L5WSQC_Hw9FNw8_TxVXBxDfAP9gzx9PdTcAwIcAxyDAkN5mFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BhgaGxpYmloZGTk6GxsSpAgAf8iQt |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | KR101394912BB1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_KR101394912BB13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 15:38:06 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English Korean |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_KR101394912BB13 |
| Notes | Application Number: KR20130018509 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140514&DB=EPODOC&CC=KR&NR=101394912B1 |
| ParticipantIDs | epo_espacenet_KR101394912BB1 |
| PublicationCentury | 2000 |
| PublicationDate | 20140514 |
| PublicationDateYYYYMMDD | 2014-05-14 |
| PublicationDate_xml | – month: 05 year: 2014 text: 20140514 day: 14 |
| PublicationDecade | 2010 |
| PublicationYear | 2014 |
| RelatedCompanies | TES CO., LTD |
| RelatedCompanies_xml | – name: TES CO., LTD |
| Score | 2.9164987 |
| Snippet | The present invention relates to a thin film deposition apparatus. According to the present invention, the thin film deposition apparatus includes: a chamber... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | THIN FILM DEPOSITION APPARATUS |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140514&DB=EPODOC&locale=&CC=KR&NR=101394912B1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFN2bTkXnHAWlb0Vi03V9KNI2La1zXek62dtokwoycMNV_Pe9lM75tLeQwF1ycLmv3C8AD0Iv89IYCk0WeTSaF1wbCZ1rhsFNNB9EYpLL1xbxMJzTl4WxaMFq1wtT44T-1OCIqFEc9b2q7-vNPonF6reV28fiA6fWz0FmM7WJjjFaQAdAZa7tJ1M29VTPs8epGqfo6yJbapEnF0OlI-lHS6B9_82VbSmb_zYlOIPjBMl9VufQWq27cOrtvl7rwsmkqXjjsFG-7QUMsjCKlSB6nSgMGc8imV1SnCRxUiebzy7hPvAzL9SQ0fLvWMtxut-US_QraGPAX16DovN3c2TR3BTom-WEWJRQYgoq0HZwS4gb6B-i1Du8fAsdKShZASe0D-3q67u8Q8NaFYNaIL8Gkndx |
| link.rule.ids | 230,309,786,891,25594,76903 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFOebTsWPOQtK34rEpuv6UKQfK639WOk62Vtpmw5k4Iar-O97KZ3zaW8hgbvk4HL3u8tdAJ6YXOWVMmIST_JINC9KaczkUlKUUkXzQXhPcv7aIhq5c_q2UBYdWO1qYZo-oT9Nc0TUqBL1vW7u680-iGU3byu3z8UHTq1fnVS3xRYdI1pAB0C0TX0ST-2pJVqW7idilKCvi2ypRl5MhEpHKmLCBiu9m7wsZfPfpjhncBwjuc_6HDqrdR961u7rtT6chG3GG4et8m0vYJi6XiQ4XhAKNjKeeTy6JBhxbCRGOp9dwqMzSS1XQkbZ37EyP9lvyiTyFXQR8FfXIMjlUh1rNFcZ-mY5IRollKiMMrQdpcbYDQwOUbo9vPwAPTcNgyzwIv8OTrnQeDac0AF066_v6h6NbF0MG-H8AsD5els |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=THIN+FILM+DEPOSITION+APPARATUS&rft.inventor=YOON%2C+DAE+GEUN&rft.date=2014-05-14&rft.externalDBID=B1&rft.externalDocID=KR101394912BB1 |