OMITTED

• Main Author: CHO, SU YEON
• Format: Patent
• Language: English; Korean
• Published: 13.02.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Disclosed is a door opening and closing device which is attached to a port door driven up and down to transfer a wafer by closing and opening a containing port for containing and transferring the wafer. The door opening and closing device for opening and closing a port door through a link bar comprises a first case; a link bar including an upper end in which a first cam follow is formed, an middle end which is hinge coupled to the inside of the first case and a lower end in which a second cam follow is formed; a first cam which is formed to allow the first cam follow to be moved up and down and to be rotated; a door connection part which is coupled to the first cam while being coupled to a port door; a second cam which is formed to allow the second cam follow to be moved up and down and to be rotated; a cylinder part which is coupled to the second cam to move the door connection part through a cylinder moved forward and backward; a forward and backward moving part including a first guide part which is formed to protrude toward the outside and is fixed in both sides of the first case and a second guide part which is sliding coupled to the first guide part while being coupled to the door connection part; and an upward and downward moving part for fixing the first case so that the first case can be moved up and down. Thereby, the present invention is able to provide the door opening and closing device for opening and closing a port door through a link bar, capable of opening and closing the port door connected to the upper side of the link bar inclined at a certain angle based on the two ends in the cylinder connected to the lower side of the link bar.