METHOD FOR ESTIMATING ANGULAR POSITION OUTPUT ERROR OF ROTARY ANGULAR DETECTION SENSOR EQUIPPED ON ELECTRO-OPTICAL DEVICE

• Main Authors: YOON, YONG EUN, SONG, DAE BUEM, LEE, HAENG BOK
• Format: Patent
• Language: English; Korean
• Published: 13.05.2013
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

PURPOSE: A method for estimating a position output error of a rotary detecting device mounted in an electron optical device is provided to improve the accuracy of position output error values of all electron optical devices. CONSTITUTION: A method for estimating a position output error of a rotary detecting device mounted in an electron optical device is as follows. The electron optical device, which is a target object, is mounted on a rotation driving device, and an initial alignment for aligning the electron optical device and an optical collimator positioned in the front side thereof is performed(S410). The rotation driving device is driven at a first reference angle, and a position output error value at the first reference angle is calculated after aligning the electron optical device and the optical collimator by driving the electron optical device(S420). The prior step is repeated as much as the number of error parameters at least by changing the reference angle. The error parameter values are calculated based on a profile function by using the obtained position output error values(S430). The position output error profile with respect to the whole driving range is estimated based on the calculated parameter values. [Reference numerals] (S410) Initially arrange; (S420) Measure a position output error at a first reference angle; (S430) Repeat the position output error measuring step; (S440) Calculate an error parameter; (S450) Measure a position output error for the whole range