SLIDE HOLDER OF SCANNING ELECTRON MICROSCOPE

PURPOSE: An automatic sample exchange apparatus for a scanning electron microscope is provided to reduce switching time by being rotated in a state in which a sample is put and to accurately fix the location center of a sample. CONSTITUTION: A sample is put on a rotation sample holder device(20) and...

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Bibliographic Details
Main Authors OH, SE KYU, KIM, DONG KWANG, YIM, HONG JAE, YANG, KYUNG SUN
Format Patent
LanguageEnglish
Korean
Published 19.12.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PURPOSE: An automatic sample exchange apparatus for a scanning electron microscope is provided to reduce switching time by being rotated in a state in which a sample is put and to accurately fix the location center of a sample. CONSTITUTION: A sample is put on a rotation sample holder device(20) and rotated. A slide holder transfer device(30) slides the rotation sample holder device to a specific location. A multi controlling element(40) revolves the rotation sample holder device. The multi controlling element adjusts a slide section of the slide holder transfer device and fixes the lens center axis of a sample holder. An actuator drives a step motor(60). The step motor transfers the slide holder transfer device. A step motor controlling part controls the step motor. A voltage adjusting part adjusts voltage which is provided to the actuator.
Bibliography:Application Number: KR20100082904