PRESSURE CONTROL DEVICE OF FLAT PANEL DISPLAY AND SEMICONDUCTOR'S APPARATUS

• Main Author: SONG, YANG SEOP
• Format: Patent
• Language: English; Korean
• Published: 09.05.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE: A flat panel display and pressure adjusting device of semiconductor manufacture equipment are provided to form a first actuator on a housing wherein the first actuator includes a main shaft which rotates and an upper/lower driving shaft, thereby completely sealing a main fluid flowing passa...