PRESSURE CONTROL DEVICE OF FLAT PANEL DISPLAY AND SEMICONDUCTOR'S APPARATUS

PURPOSE: A flat panel display and pressure adjusting device of semiconductor manufacture equipment are provided to form a first actuator on a housing wherein the first actuator includes a main shaft which rotates and an upper/lower driving shaft, thereby completely sealing a main fluid flowing passa...

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Bibliographic Details
Main Author SONG, YANG SEOP
Format Patent
LanguageEnglish
Korean
Published 09.05.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A flat panel display and pressure adjusting device of semiconductor manufacture equipment are provided to form a first actuator on a housing wherein the first actuator includes a main shaft which rotates and an upper/lower driving shaft, thereby completely sealing a main fluid flowing passage. CONSTITUTION: A main fluid flowing passage(110) is formed on one side of a housing(100). A fluid passage sealing member(200) opens and closes the main fluid flowing passage. A first actuator(300) rotates or vertically moves the fluid passage sealing member. The first actuator comprises the main shaft(330) revolving according to the drive of the power transmission(310). A second actuator(400) pressurizes the fluid passage sealing member.
Bibliography:Application Number: KR20100067872