AN ION-BEAM IRRADIATION DEVICE USING A SET OF ELECTROMAGNETS AND THE IRRADIATION METHOD USING THE SAME

• Main Authors: JANG, JI HO, CHO, YONG SUB
• Format: Patent
• Language: English
• Published: 11.04.2008
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A uniform ion-beam irradiation device using electromagnets and a method for uniformly irradiating ion-beam using the same are provided to improve uniformity of the ion-beam without using an additional control apparatus by radiating a beam at a boundary region where the ion-beam is relatively converged and focusing the beam at a central region. A tetrapolar electromagnet(310) controls the focusing and radiation of an irradiated ion beam. A pair of horizontal bipolar electromagnets(112) consists of a pair of magnetic poles facing to each other vertically, thereby forming a vertical direction magnetic field. A pair of vertical bipolar electromagnets(114) consist of a pair of magnetic poles facing to each other horizontally, thereby forming a horizontal direction magnetic field. A power unit(120) is connected to the tetrapolar electromagnet, the horizontal bipolar electromagnets, and the direction bipolar electromagnets. The power unit supplies AC power to the tetrapolar electromagnet and the horizontal bipolar electromagnets. A frequency of an alternating current supplied to the tetrapolar electromagnet is two times of a frequency of an alternating current supplied to the horizontal bipolar electromagnets.