PARTICLE REMOVING APPARATUS OF PARTICLE HAVING KNIFE FOR SUBSTRATE

• Main Authors: OH, SE JEUNG, SEOK, HYUN HO, SUH, YONG HO
• Format: Patent
• Language: English
• Published: 19.10.2007
• Subjects: CLEANING; CLEANING IN GENERAL; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PREVENTION OF FOULING IN GENERAL; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING

A particle removing apparatus having a knife for a substrate is provided to improve the quality of a substrate by simultaneously or selectively removing adhesive particles and inadhesive particles from the substrate. An inadhesive particle removing unit(10) includes an outlet chamber(120), an ultrasonic oscillator(140), two air intake chambers(110), and a branch port(130). The outlet chamber discharges an air for removing inadhesive particles. The ultrasonic oscillator oscillates an air in the outlet chamber. Two air intake chambers are disposed at right and left sides of the outlet chamber, respectively. The branch port branches off into discharge and intake. An adhesive particle removing unit(20) includes a moving cylinder for up-and-down movement(210) and a knife(250). The cylinder is attached to one side surface of the inadhesive particle removing unit. The knife is mounted under the cylinder.