METHOD OF ALIGNING A PANEL

A method for aligning a panel is provided to minimize an align error of a mask and a panel by calculating aligned positions of the mask and/or panel through an analytical equation. A panel with a first align mark and a mask with a second align mark corresponding to the first align mark are loaded(S1...

Full description

Saved in:
Bibliographic Details
Main Authors KIM, KWANG SUK, JUNG, SU YEON, RYU, SUN JOONG
Format Patent
LanguageEnglish
Published 04.10.2007
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:A method for aligning a panel is provided to minimize an align error of a mask and a panel by calculating aligned positions of the mask and/or panel through an analytical equation. A panel with a first align mark and a mask with a second align mark corresponding to the first align mark are loaded(S1). A first coordinate data corresponding to a position of the first align mark and a second coordinate data corresponding to a position of the second align mark are generated(S2). A correction data is generated so that an error between the first coordinate data and the second coordinate data is below a predetermined reference value(S3). A panel and/or the mask is moved in response to the correction data(S4).
Bibliography:Application Number: KR20060055099