METHOD OF ALIGNING A PANEL
A method for aligning a panel is provided to minimize an align error of a mask and a panel by calculating aligned positions of the mask and/or panel through an analytical equation. A panel with a first align mark and a mask with a second align mark corresponding to the first align mark are loaded(S1...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
04.10.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A method for aligning a panel is provided to minimize an align error of a mask and a panel by calculating aligned positions of the mask and/or panel through an analytical equation. A panel with a first align mark and a mask with a second align mark corresponding to the first align mark are loaded(S1). A first coordinate data corresponding to a position of the first align mark and a second coordinate data corresponding to a position of the second align mark are generated(S2). A correction data is generated so that an error between the first coordinate data and the second coordinate data is below a predetermined reference value(S3). A panel and/or the mask is moved in response to the correction data(S4). |
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Bibliography: | Application Number: KR20060055099 |