METHOD OF MEASURING A SURFACE VOLTAGE OF AN INSULATION LAYER

In a method of measuring a surface voltage of an insulating layer, the number of times that surface voltages are measured in a depletion region increases so that precise data about the depletion region may be obtained. The number of times that the surface voltages are measured in an accumulation reg...

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Bibliographic Details
Main Authors LEE, MI SUNG, JUN, CHUNG SAM, LEE, BYUNG SUG, YANG, YU SIN
Format Patent
LanguageEnglish
Published 15.09.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:In a method of measuring a surface voltage of an insulating layer, the number of times that surface voltages are measured in a depletion region increases so that precise data about the depletion region may be obtained. The number of times that the surface voltages are measured in an accumulation region and an inversion region decreases so that the data about the depletion region may be rapidly obtained.
Bibliography:Application Number: KR20050069954