AN EXHAUST SYSTEM FOR AN ION IMPLANTER AND A METHOD FOR EXHAUSTING BY-PRODUCT IN THE SAME

• Main Authors: RHEEM, BYEONG KI, OH, SANG GUEN
• Format: Patent
• Language: English; Korean
• Published: 16.10.2000
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PURPOSE: An exhaust system of an ion implanter and an exhaust method are provided to prevent a corona discharge from being generated in an exhaust line located in the ion implanter by disconnecting a connection loop of a corona discharge mechanism, and to remove a moisture(H2O) in the exhaust line b...