荷電粒子線装置及び当該装置を用いる試料作製方法

• Format: Patent
• Language: Japanese
• Published: 23.02.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

熱に弱い材料を観察するための試料作製において、最終観察面を作製した直後の清浄な状態を観察可能とする。冷却機構を備えたマイクロプローブと、試料を冷却した状態を保持する機構を備えた第１の試料ホルダーと、前記マイクロプローブと第１の試料ホルダーを導入できるステージを備えた荷電粒子線装置を使用して試料を作製する方法において、冷却保持された第１の試料ホルダー上の試料から塊状の試料片を切り出す工程と、該試料片を一定温度に冷却された前記マイクロプローブの先端に接着させ、第１の試料ホルダーとは異なる、冷却保持された薄膜観察用の第２の試料ホルダーに前記荷電粒子線装置の真空室内で移載する工程と、薄膜観察用試料ホルダーに移載された該試料片をマイクロプローブから切り離した後、該試料片を切り出し時の厚さよりも薄い厚さに薄膜加工する工程と、薄膜加工後の該試料片を観察する工程とを有する試料作製方法を有する。 The present invention enables a sample to be observed in a clean state directly after preparation of a final observation surface when preparing a sample for observing a material that is sensitive to heat. The present invention is a method of preparing a sample using a charged particle beam device including a microprobe having a cooling mechanism, a first sample holder having a mechanism for retaining a sample in a cooled state, and a stage into which the microprobe and the first sample holder can be introduced, the method including cutting a bulk-shaped sample piece from the sample on the first sample holder retained in a cooled state; adhering the sample piece to a distal end of the microprobe that is cooled to a fixed temperature and transferring the sample piece to a second sample holder for thin film observation retained in a cooled state, which is different from the first sample holder, within a vacuum chamber of the charged particle beam device; separating the sample piece that has been transferred to the second sample holder from the microprobe and thin film processing the sample piece to a thickness that is less than the thickness during cutting; and observing the sample piece after the thin film processing.