DIAMOND-COATED MATERIAL AND PRODUCTION THEREOF

• Main Authors: KAMATA MASATO, KUWAE YOSHINORI, KANEKO HISAFUMI
• Format: Patent
• Language: English
• Published: 15.03.1989
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

PURPOSE:To obtain a diamond-coated material having excellent adhesivity and useful for the abrasion-resistant coating for jig and tool, etc., by depositing a diamond film containing a specific amount of sulfur on the surface of a substrate using a chemical vapor deposition process. CONSTITUTION:A substrate (e.g. Mo plate) is placed in a reaction vessel. A reaction gas is prepared by mixing (A) a hydrocarbon raw material gas composed of methane, ethane, propane and butane at volume ratios of (85-92):(3-8):(2-7):(0.5-4) with (B) a carrier gas (e.g. H2) at a volume ratio of (0.1-15):(99.9-85). The reaction gas is introduced into the reaction vessel and a sulfur component is added to the content at a weight ratio of 0.1-1,000ppm. The reaction vessel is subjected to a chemical vapor deposition process using a hot filament to effect the growth of a diamond film containing 0.01-1,000ppm (by weight) of sulfur on the surface of the substrate and obtain the objective diamond-coated material.