PRODUCTION OF GROUP III-V COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
PURPOSE:To prevent penetration of group V droplet to a growing crystal and produce the titled single crystal having low rearrangement in good yield, by dipping a specific and prism-shaped seed crystal into a raw material melt and pulling up the dipped crystal. CONSTITUTION:A prism-shaped seed crysta...
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Main Author | |
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Format | Patent |
Language | English |
Published |
08.02.1989
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To prevent penetration of group V droplet to a growing crystal and produce the titled single crystal having low rearrangement in good yield, by dipping a specific and prism-shaped seed crystal into a raw material melt and pulling up the dipped crystal. CONSTITUTION:A prism-shaped seed crystal 3 having a long axis of and four side faces parallel to the long axis of {011} is dipped into a raw mate rial melt and a single crystal 1 is pulled up by a liquid sealing pulling-up method to provide the group III-V semiconductor single crystal wherein Ga of corn part, facet 2a and As facet 2b do not coincide with four angles 4 of the seed crystal 3 and rearrangement density is 3,000-20,000/cm . |
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Bibliography: | Application Number: JP19870193826 |