FORMATION OF ULTRAFINE PARTICLE OF OXIDE

PURPOSE:In producing ultrafine particles of metallic oxide by heating and evaporating a metallic material in an oxygen-containing atmosphere by arc discharge between electrodes, to obtain high-purity ultrafine particles of metallic oxide, by constituting at least the cathode of carbon. CONSTITUTION:...

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Bibliographic Details
Main Author FUCHIDA HIDETSUGU
Format Patent
LanguageEnglish
Published 15.04.1988
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Summary:PURPOSE:In producing ultrafine particles of metallic oxide by heating and evaporating a metallic material in an oxygen-containing atmosphere by arc discharge between electrodes, to obtain high-purity ultrafine particles of metallic oxide, by constituting at least the cathode of carbon. CONSTITUTION:An anode 2 and a cathode 3 consisting of carbon are arranged in a vacuum container 1 and a metallic material a (e.g. Ru or Al) is put on the top of the anode 2. Then the vacuum container 1 is evacuated by a vacuum pump 9, an oxygen-containing gas is introduced through a feed pipe 5 into the container and the container 1 is filled with an oxygen-containing atmosphere. Then DC voltage is impressed to the anode 2 and the cathode 3, arc discharge is generated, the metallic material a is heated, evaporated and brought into contact with the oxygen-containing atmosphere to form ultrafine particles of metallic oxide. Consequently, since the cathode consists of a carbon electrode, the ultrafine particles of metallic oxide are not admixed with oxides of cathode like the case of tungsten cathode.
Bibliography:Application Number: JP19860228403