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Summary:PURPOSE:To finely work an electrically conductive difficult-to-grind material with high efficiency and precision by arranging an electrode in the vicinity of a position where a work is irradiated by laser light, supplying a liq. etchant to the gap between the electrode and the work, and impressing a DC voltage between both electrode and work. CONSTITUTION:The conductive difficult-to-grind work 1 is placed in an etching vessel 2. The liq. etchant 6 is supplied to the etchant supply hole 3a of a working head 3, fed to the gap 11 through a tiny hole 5, and then returned to an etchant tank 16. The surface of the work 1 is irradiated by the laser light, a set DC voltage is impressed between the work 1 and the electrode 12, and grooving is started. The part of the work 1 locally heated by the laser light is efficiently etched as the temp. of the etchant 6 increases. As a result, the protrusion on the working surface provided with fine ruggednesses is preferentially dissolved, and a groove having a set width is successively formed on the surface of the work 1 with high precision.
Bibliography:Application Number: JP19870150309