MIRROR SUPPORTING DEVICE

• Main Authors: TAKADA SHIRO, TSUKUI KEITARO, ITO NOBORU
• Format: Patent
• Language: English
• Published: 28.10.1988
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

PURPOSE:To facilitate pressure control over a high pressure chamber by making a pressure receiving plate return horizontally when the inclination of a support body or mirror varies, and supporting the mirror while the direction of mirror supporting force based upon the reaction of the pressure receiving plate is set perpendicular. CONSTITUTION:When proper pressure is applied to an air pressure chamber 10, force which operates on a support jig 8 is all transmitted to the pressure receiving plate 9 through only the air in the high pressure chamber 10 and borne by a mirror cell 5 through a support rod 13. At this time, the support jig 8 receives the reaction from the pressure receiving plate 9 through the air in the high pressure chamber 10, but this reaction operates invariably at right angles to the surface of the pressure receiving plate 9. Here, even if the mirror 1 slants, the pressure receiving plate 9 is controlled to a horizontal attitude, so the support jig 8 receives invariably perpendicular force and can support the mirror 1. Further, the direction of the generation of the support force is invariably perpendicular, so a support load becomes constant. Consequently, the pressure in the high pressure chamber 10 is only held constant, so the control is facilitated.