MALTI-POLE LENS EMPLOYING PERMANENT MAGNET

PURPOSE:To compose a magnetic malti-pole lens without employing a private power supply and a cooling system by providing permanent magnets and magnetic yokes in orbits of ion and electron beams. CONSTITUTION:A flux generated by a permanent magnet 4 permeates through the sidewall of a vacuum chamber...

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Bibliographic Details
Main Author ISHIZAKI SHINICHI
Format Patent
LanguageEnglish
Published 12.10.1988
Subjects
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