MALTI-POLE LENS EMPLOYING PERMANENT MAGNET

PURPOSE:To compose a magnetic malti-pole lens without employing a private power supply and a cooling system by providing permanent magnets and magnetic yokes in orbits of ion and electron beams. CONSTITUTION:A flux generated by a permanent magnet 4 permeates through the sidewall of a vacuum chamber...

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Bibliographic Details
Main Author ISHIZAKI SHINICHI
Format Patent
LanguageEnglish
Published 12.10.1988
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PURPOSE:To compose a magnetic malti-pole lens without employing a private power supply and a cooling system by providing permanent magnets and magnetic yokes in orbits of ion and electron beams. CONSTITUTION:A flux generated by a permanent magnet 4 permeates through the sidewall of a vacuum chamber 1 made of aluminum or stainless steel and gets each magnetic pole 3 made of soft iron and provided in the vacuum chamber 1 magnetized in S and N pole by a rule of magnetic induction. The magnetic pole 3 magnetized in this way generates a magnetic field for obtaining quadruple type lens effect in the center of the vacuum chamber 1. Adjustment of intensity of the quadruple type lens, that is, adjustment of the magnetic field of the center of the vacuum chamber 1 is achieved by moving the permanent magnet 4 in the direction of a magnetic yoke 2, that is, the direction of pulling it toward the peripheral part of the vacuum chamber 1.
Bibliography:Application Number: JP19870077039