PROCESSOR

• Main Authors: MIZOGAMI KAZUAKI, KAWABATA YUICHI
• Format: Patent
• Language: English
• Published: 04.07.1988
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; DRYING; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; WEAPONS

PURPOSE:To prevent moisture from getting mixed in processing vapor and a vapor generator by providing cooling means for circulating heated vapor from the vapor generator, and gas supply means for supplying dry gas to a space above the cooling means. CONSTITUTION:Heated vapor generated by heating isopropylalcohol of a vapor generator 2 by a heater 3 is condensed by a cooling zigzag tube 9, dropped and circulated. When dry carbonate gas is continuously supplied from a feed tube 14 into a body 1, carbonate gas range is formed in the upper space of vapor surface 15 near the tube 9. When the circulation becomes a normal state, a semiconductor wafer 16 is conveyed to a predetermined position, and dried. After the drying is completed, the wafer 16 is placed at the intermediate position of the cooling tubes 9, 10, and removed after a predetermined time is elapsed. Accordingly, outer air is not contacted with the tube 9 to prevent moisture from getting mixed in vapor and the generator 2, thereby enhancing the reliability of the process.