STAGE FOR POSITIONING

• Main Authors: IKEDA MINORU, TANIGUCHI MOTOYA
• Format: Patent
• Language: English
• Published: 08.05.1987
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONTROLLING; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TRANSPORTING

PURPOSE:To reduce load, and facilitate positioning at a high speed and with high accuracy, as well as wiring for driving by guiding a stage by means of a plane provided on a base, and driving said stage by means of driving devices in X, Y, and theta directions which are fixed on said base. CONSTITUTION:A stage 10 slides being in contact with the smooth surface 11 of a base 3, having the degree of freedom of movement in three directions within the surface 11. The stage 10 is driven by a theta driving mechanism 7, and guided in two directions which intersect nearly perpendicularly with each other within the surface 11, via an angle transmitting mechanism 12 consisting of two straight line guide mechanisms 13, 14, to change its angle. On the other hand, the stage 10 is driven by an X direction driving device 2 and a Y direction driving device 5 which are fixed on the base 3, to be positioned in an arbitrary position without being interfered with change in angle. Thus, the driving devices are fixed to the top of the base 3, facilitating wiring, etc., while enabling positioning at a high speed and with high accuracy due to low weight of load.