CONTINUOUS PLASMA IRRADIATION DEVICE FOR STRIP

• Main Author: SAKAMI TOSHIYUKI
• Format: Patent
• Language: English
• Published: 16.04.1987
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

PURPOSE:To perform sure surface treatment with compact construction by generating plasma by glow discharge using a high-frequency coil and confining the same by an electrostatic sealing means. CONSTITUTION:The high-frequency coil 15 is disposed by positioning a nonmagnetic tubular body 13 on the inside. Gas to be converted to plasma is introduced through a gas introducing port 14 to the inside of the high-frequency coil 15. An AC voltage is impressed to the coil to generate a glow discharge on the inside of the coil 15 and to convert the gas to the plasma. On the other hand, a DC voltage is impressed between an anode 6 and cathode 7 to generate a static electric field on both end sides of the body 13. The plasma is sealed by such static electric filed so as not to diffuse to the circumference. The gas which lost the electric charge is discharged through an aperture 12 and a discharge passage 9 by a discharge device 11 and is returned through the port 14 to the inside of the high-frequency coil 15. The strip 3 passed the inside of the confined plasma and is thus exposed thereto.