APA (7th ed.) Citation

CHIKAKUNI, Y., & YASUSHI, M. (1987). PLASMA PROCESSING CONDITION DIAGNOSING APPARATUS.

Chicago Style (17th ed.) Citation

CHIKAKUNI, YABUMOTO, and MURAMATSU YASUSHI. PLASMA PROCESSING CONDITION DIAGNOSING APPARATUS. 1987.

MLA (9th ed.) Citation

CHIKAKUNI, YABUMOTO, and MURAMATSU YASUSHI. PLASMA PROCESSING CONDITION DIAGNOSING APPARATUS. 1987.

Warning: These citations may not always be 100% accurate.