CHARAGED PARTICLE ENERGY ANALYZER

PURPOSE:To improve a S/N as well as increase a detection sensitivity, by providing a low-pass filter, an incident slit, an outgoing slit, a bypass filter and a band-pass filter. CONSTITUTION:The analyzer in the coption is provided with a low-pass filter 9 which is formed along a part of the peripher...

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Bibliographic Details
Main Author KUMASHIRO SUMIO
Format Patent
LanguageEnglish
Published 08.10.1987
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PURPOSE:To improve a S/N as well as increase a detection sensitivity, by providing a low-pass filter, an incident slit, an outgoing slit, a bypass filter and a band-pass filter. CONSTITUTION:The analyzer in the coption is provided with a low-pass filter 9 which is formed along a part of the periphery of an ellipsoid, an incident slit 4 which is arranged at one focus position of the ellipsoid, an outgoing slit 12 which is arranged at the other focus position of the ellipsoid, a spherically formed high-pass filter 13 whose center of curvature is at the other focus position and a band-pass filter 3 which is consisting of two sets of concentric and spherically formed grids 5a, 5b and 6a, 6b which are focusing the charged particle beams emitted from a specimen 1 on the incident slit 4. Thus, the electron beams reach the inside of the analyzer with good efficiency so that detection sensitivity is increased and high energy electrons are suppressed to enter the analyzer by the band-pass filter 3 so that emission of the secondary electrons is lessened and a S/N ratio is improved.
Bibliography:Application Number: JP19860074591