CHARGED PARTICLE ENERGY ANALYZER

• Main Author: KUMASHIRO SUMIO
• Format: Patent
• Language: English
• Published: 05.10.1987
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PURPOSE:To take a solid angle larger as compared with the conventional electrostatic hemisphere type dispersive analyzer as well as to improve the extent of detection sensitivity, by leading charged particles converged by a decelerating lens system into a nondispersive analyzer having both low-pass and high-pass filters. CONSTITUTION:The photoelectron emitted out of a sample 1 is converged on an incident slit 3 by a decelerating lens system 2. Kinetic energy of the photoelectron passing through the incident slit 3 is more than a range of V1 (eV) whereby it reaches a low-pass filter after uniform rectilinear motion. At this low-pass filter, such a photoelectron whose kinetic energy is lower than that of V2 (eV) is reflected, moving toward an incident slit 7, and another photoelectron whose kinetic energy is higher than the V2 (eV) collides with a reflecting surface 5, losing it charge. The photoelectron passing through the incident slit 7 reaches a high-pass filter 8, and such a photelectron whose kinetic energy is lower than a range of V3 (eV) is reflected by a second grid 10, while another photoelectron whose kinetic energy is higher than this V3 (eV) passes through it, entering a detector 12, whereby such photoelectron that is within the range of V3-V2 (eV) is caught and detected.