FET ION SENSOR
PURPOSE:To obtain a stable and long-life FET ion sensor by using a copolymer of vinyl chloride, vinyl alcohol and vinyl acetate as a film base material for an ion sensitive film. CONSTITUTION:An insulated gate type field effect transistor is constituted of a silicon substrate 1, a source 2, a drain...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
29.09.1987
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| Subjects | |
| Online Access | Get full text |
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| Abstract | PURPOSE:To obtain a stable and long-life FET ion sensor by using a copolymer of vinyl chloride, vinyl alcohol and vinyl acetate as a film base material for an ion sensitive film. CONSTITUTION:An insulated gate type field effect transistor is constituted of a silicon substrate 1, a source 2, a drain 3 and a gate part consisting of an SiO2 layer 4 and an Si3N4 layer 5. the ion sensitive film 6 is formed on the gate part by dispersing a plasticizer and ion sensitive material into the copolymer of vinyl chloride, vinyl alcohol and vinyl acetate. This copolymer has preferably 200-1,000 average degree of polymn. and the ratio of the vinyl alcohol in the vinyl chloride, vinyl alcohol and vinyl acetate is preferably 1.5-20mol%. |
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| AbstractList | PURPOSE:To obtain a stable and long-life FET ion sensor by using a copolymer of vinyl chloride, vinyl alcohol and vinyl acetate as a film base material for an ion sensitive film. CONSTITUTION:An insulated gate type field effect transistor is constituted of a silicon substrate 1, a source 2, a drain 3 and a gate part consisting of an SiO2 layer 4 and an Si3N4 layer 5. the ion sensitive film 6 is formed on the gate part by dispersing a plasticizer and ion sensitive material into the copolymer of vinyl chloride, vinyl alcohol and vinyl acetate. This copolymer has preferably 200-1,000 average degree of polymn. and the ratio of the vinyl alcohol in the vinyl chloride, vinyl alcohol and vinyl acetate is preferably 1.5-20mol%. |
| Author | KOYAMA MASAO KATAYAMA TETSUYA SUGANO KENICHI |
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| Notes | Application Number: JP19860064132 |
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| PublicationYear | 1987 |
| RelatedCompanies | TOSHIBA CORP |
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| Snippet | PURPOSE:To obtain a stable and long-life FET ion sensor by using a copolymer of vinyl chloride, vinyl alcohol and vinyl acetate as a film base material for an... |
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| SubjectTerms | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| Title | FET ION SENSOR |
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