DEVICE FOR VAPORIZING LIQUID GLASS MATERIAL

• Main Authors: MIKAMI MASATOSHI, MATSUBARA KUNIHIRO, FURUI YASURO
• Format: Patent
• Language: English
• Published: 12.09.1987
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; GLASS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PURPOSE:To stably vaporize a liq. glass material for a long time by controlling the temp. of a heat-transfer medium which is focibly circulated through a heat- transfer medium passage provided on the wall of a bubbling vessel based on the detected temp. of the liq. glass material in the vessel. CONSTITUTION:A carrier gas such as Ar is blown into the liq. glass material 10 such as SiCl4 charged in the airtight bubbling vessel 11 from a carrier gas blowing pipe 12 to vaporize the liq. glass material 10 by bubbling. The vaporized gas obtained is supplied to a reaction system along with the carrier gas from a vaporized material discharge pipe 13. The heat-transfer medium passage 14 is provided on the wall of the bubbling vessel 11. A pipeline used as a forced circulation passage 19 and provided with a temp. regulator 17 and a circulation mechanism 18 is furnished between the inlet 15 and the outlet 16 of the passage 14. In addition, a temp. controller 20 equipped with a temp. sensor 21 inserted into the bubbling vessel 11 is connected to the temp. regulator 17. Consequently, the temp. of the liq. glass material 10 in the bubbling vessel 11 can be effectively controlled, and vaporization is stably carried out.