DEVICE FOR PRODUCING SYNTHETIC GLASS
PURPOSE:To prevent gas from leaking and the impurities from mixing into the inside of a vessel from the outside by constituting a reaction vessel of the double wall bodies and providing such a means that both the gas pressure in the vessel and the gas pressure of the space between the wall bodies ar...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
15.08.1987
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To prevent gas from leaking and the impurities from mixing into the inside of a vessel from the outside by constituting a reaction vessel of the double wall bodies and providing such a means that both the gas pressure in the vessel and the gas pressure of the space between the wall bodies are relatively changed for the gas pressure in the outside of the vessel. CONSTITUTION:All parts or one part of a reaction vessel 1i is constituted of the double wall bodies 11 having an internal space 10. Both an air supplying system 12 communicated to the internal shape 10 and an exhaust system 14 having a pressure regulating valve 13 are joined to the double wall bodies 11. Further both the gas pressure in the reaction vessel 1 and the gas pressure in the internal space 10 of the double wall bodies 11 are relatively regulated for the gas pressure in the outside of the reaction vessel 1. A control apparatus 18 is provided as this mechanism and one part or all parts of the gas introducing systems 2a, 2b, a gas discharging system 3, the air supplying system 12 and the exhaust system 14 are controlled in basing on the input of the measured values of each pressure page 15-17. The degree of cleanliness in the inside of the reaction vessel 1 is well kept by this mechanism and a high-quality porous glass layer 21 is obtained. |
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Bibliography: | Application Number: JP19860027530 |