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Summary:PURPOSE:The titled device for establishing in a wide range a proportional relation between flow rate of carrier gas and feed amt. of a raw material in a device provided with a gas introducing pipe with a blowing device inserted into the liquid phase in a vessel for contg. a liquid raw material, and a gas drawing pipe connected to the gaseous phase wherein the blowing device is specified. CONSTITUTION:Liquid phase 13 formed by the contained liquid raw material and gaseous phase 14 are present in a vessel 12 housed in a termostat 11. To the vessel 12, a gas introducing pipe 15 inserted into the liq. phase 13 and a gas drawing pipe 16 connected to the gaseous phase 14 are also provided, and a flow rate controller 17 is provided to the pipe line of the gas introducing pipe 15. A blowing device 18 comprising a porous sintered body is fitted to the blowing end of the introducing pipe 15. The blowing device contains many micropores having micron order pore size. Even if a large amt. of carrier gas is blown into the liquid phase 13, the gas is atomized by the micropores forming a group of atomized foam which can carry sufficiently the vaporized raw material in the atomized foams. Accordingly a proportional relation between the flow rate of the carrier gas and the amt. of raw material to be fed is established in a wide range.
Bibliography:Application Number: JP19840180115