METHOD FOR FORMING SUSCEPTOR COATING

PURPOSE:To prevent susceptors from deforming, where oxide coatings are formed in a wet hydrogen furnace, by putting susceptor covers between a plural of susceptors and upper and lower heaters. CONSTITUTION:A lower cover 5a is put on a mesh belt 1, and an upper cover 5b is put, covering susceptors 4...

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Bibliographic Details
Main Author KATSUMATA TOMOYUKI
Format Patent
LanguageEnglish
Published 02.10.1986
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE:To prevent susceptors from deforming, where oxide coatings are formed in a wet hydrogen furnace, by putting susceptor covers between a plural of susceptors and upper and lower heaters. CONSTITUTION:A lower cover 5a is put on a mesh belt 1, and an upper cover 5b is put, covering susceptors 4 being set on the cover 5a. The covers 5a, 5b may be made of any material having ability withstanding to furnace temperature, for example preferably stainless steel. By putting the covers 5a, 5b between the respective heaters 3, 2 the heat radiated from the lower heater 3 is intercepted by the lower cover 5a and can not reach the susceptors 4, and the heat radiated from the upper heater 2 is intercepted by the upper cover 5b and can not reach the susceptors 4. In this way, the heat radiated from each heater which may incite the susceptors to deform, can be effectively intercepted.
Bibliography:Application Number: JP19850062013