VISUAL SENSOR
PURPOSE:To eliminate the need of a MOS transistor for insulation by using a photodiode consisting of a p-n<-> junction between an undoped n<-> a-Si film and a p-type a-Si film as a photoelectric element constituting a picture element in a visual sensor. CONSTITUTION:A common transparent...
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Main Author | |
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Format | Patent |
Language | English |
Published |
16.09.1986
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To eliminate the need of a MOS transistor for insulation by using a photodiode consisting of a p-n<-> junction between an undoped n<-> a-Si film and a p-type a-Si film as a photoelectric element constituting a picture element in a visual sensor. CONSTITUTION:A common transparent electrode 2 is applied onto a glass substrate 1, an amorphous silicon a-Si film 3 doped to a p-type and an undoped a-Si film 4 are laminated onto the electrode 2, and metallic electrodes 5 are shaped onto the film 4. The undoped a-Si film 4 displays a weak n-type, a p-n<-> junction is shaped between the n<-> film and the p-type a-Si film 3, and photoelectric elements in each picture element are constituted by photodiodes composed of the electrodes 2 and 5 on both surfaces. Since the resistivity of the a-Si film is higher than crystal silicon, a MOS transistor for inter-element insulation which has been required can be unnecessitated. |
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Bibliography: | Application Number: JP19850049142 |