PHOTOSENSOR DEVICE

PURPOSE:To improve adhesive performance of a substrate and an insulating film and effect distribution of a flawless resin film over an expansive area, by applying an Al2O3 over a glass substrate as the basic coat and forming a polyimide resin film as an insulating film for constructing a multi-layer...

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Bibliographic Details
Main Authors ORITSUKI RIYOUJI, KANAI HIROMI, SAITOU SUSUMU
Format Patent
LanguageEnglish
Published 25.04.1985
Subjects
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
COLORIMETRY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
PRINTED CIRCUITS
RADIATION PYROMETRY
TESTING
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Summary:PURPOSE:To improve adhesive performance of a substrate and an insulating film and effect distribution of a flawless resin film over an expansive area, by applying an Al2O3 over a glass substrate as the basic coat and forming a polyimide resin film as an insulating film for constructing a multi-layer interconnection structure. CONSTITUTION:An Al2O3 basic coat 2 1,500Angstrom thick is applied on a glass substrate 1, followed by 2,500Angstrom thick Cr coat is given. This coat of Cr forms the lower wiring 3. Further, a coat of polyimide resin is applied thereon for forming an insulating film 4 after drying at 230 deg.C and then, heat cured at 350 deg.C. Al is vapor deposited on the insulating film 4 with a thickness of 1mum to form the upper wiring 5. Thus, adhesive performance of a substrate 1 and a polyimide resin insulating film 4 becomes improved and distribution of a flawless polyimide resin film 4 over an expansive area becomes available.
Bibliography:Application Number: JP19830180279