BUBBLING DEVICE FOR STARTING MATERIAL OF OPTICAL GLASS

PURPOSE:To permit stable supply of vaporized material by maintaining the liquid level in a bubbling tank at a fixed level by the function of a liquid level sensor, liquid level adjuster, and a controller. CONSTITUTION:In the stage of transporting vaporized starting material gas to a specified reacti...

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Bibliographic Details
Main Authors MATSUBARA KUNIHIRO, KAMIKURA YASUHIRO
Format Patent
LanguageEnglish
Published 11.12.1985
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Summary:PURPOSE:To permit stable supply of vaporized material by maintaining the liquid level in a bubbling tank at a fixed level by the function of a liquid level sensor, liquid level adjuster, and a controller. CONSTITUTION:In the stage of transporting vaporized starting material gas to a specified reaction system through a conducting pipe 6 by blowing carrier gas into a liquid phase part 2 of a bubbling device 1 through an introducing pipe 5, the liquid level of the liquid phase part 2 is maintained at a fixed level. The liquid level in the bubbling stage is sensed by a liquid level sensor 9, and the sensed signal is fed to a controller 13, the inputted signal is operated electrically and electronically, thus, a driving part 11 of a liquid level adjusting device 12 is driven in analog, digital or timely mode. The gas discharged from a compressor 11 (driving part) is blown into the liquid level adjusting section 10 of the liquid phase part 2 to expand the liquid by a specified extent. By this method, the liquid level of the liquid phase part 2 is held always at a fixed level; thus the contact time of bubbles of the carrier gas with the liquid starting material is held at a fixed value and vaporized starting material is supplied stably to the reaction system.
Bibliography:Application Number: JP19840106802