CHARGED CORPUSCULAR RAY ENERGY ANALYZER

PURPOSE:To prevent electro-optical entrance of secondary electron generated in an analyzer to a detector by inserting a filter which includes energy of charged corpuscular to be detected at the upper limit of passing range in the output side of analyzer. CONSTITUTION:The photo electron emitted from...

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Bibliographic Details
Main Author KUMASHIRO SUMIO
Format Patent
LanguageEnglish
Published 25.06.1985
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Summary:PURPOSE:To prevent electro-optical entrance of secondary electron generated in an analyzer to a detector by inserting a filter which includes energy of charged corpuscular to be detected at the upper limit of passing range in the output side of analyzer. CONSTITUTION:The photo electron emitted from a sample S which is irradiated with radio active ray such as X-ray, etc. is caused to pass a low-pass-filter consisting of the charged corpuscular reflecting surface M1 and gride G1 and a high-pass-filter consisting of concentric double-spheric surface grids G2, G3. Moreover, an electrostatic lens L is provided after such filters and thereby the photo electron is caused to enter an electron detector D through a cylindrical mirror type separator C. Accordingly, since energy of secondary electron is distributed widely in the higher energy band than the energy to be detected, detection sensitivity of desired charged corpuscular can be improved by eliminating the secondary electron with a low-pass-filter of the cylindrical mirror surface type separator C.
Bibliography:Application Number: JP19830225048