FIXED SLIT TYPE PHOTOELECTRIC MICROSCOPE

• Main Authors: SHINOZAKI TOSHIAKI, MORI ICHIROU
• Format: Patent
• Language: English
• Published: 28.02.1984
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING

PURPOSE:To detect the position of a linear pattern on a body to be inspected by using a single fixedly-arranged slit and an optical polarizing element as a modulating means of luminous flux incident to a photoelectric transducer. CONSTITUTION:Luminous flux from a scale line 42 on a scale 41 is incident to the photoelectric transducer 58 through the slit 54a of a slit plate 54 and a focusing lens 57 after passing through mutually different optical paths 56a and 56b by the irradiation with alternate polarized light beams P' and Q' from a light irradiating mechanism which are polarized linearly at right angles to each other and the operation of the slits 54a and the optical polarizing plates 55. This when viewed from the side of the photoelectric transducer 58 is equivalent to the effect when one slit is oscillated mechanically corresponding to a detection origin and the displacement of the scale line 42 on the scale is therefore detected.