JPS5932057B

• Main Author: YOSHIZAWA TAKESHI
• Format: Patent
• Language: English
• Published: 06.08.1984
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TESTING; TRANSPORTING

PURPOSE:To enhance efficiency and to obtain uniform cleanliness by automatically processing the washing and drying along a carrier line. CONSTITUTION:Masks 7 are loaded in a loader 9, and a wire 5 is moved. One mask is inserted and engaged in a window 6a of a carrier 6, and carried. In this case, the carrier is tilted by angle alpha from the vertical line and moved. The upper and lower ends of the mask 7 is held y bars 21 and 21' so that the mask 7 does not fall. When the mask 7 enters the portion between rotating brushes 11 and 11', detergent is injected from nozzles 13-15'. Since both surfaces are compressed by the brushes; the mask 7 does not fall without the bars 21 and 21', and the mask 7 is washed. Then, the detergent is washed off by brushes 12 and 12' and warm water from nozzles 16 and 16'. Thereafter, the mask 7 is washed by injecting high pressure warm water from vortex nozzles 17 and 17'. Then, the mask 7 is dried by blowing high pressure warm wind from nozzles 19 and 19', and static electricity is removed while the mask 7 is passing through ionizers 20 and 20'. The mask 7 is taken out of the carrier 6 by an unloader 10 and stored. Since all the operation is automatically performed, the working efficiency can be enhanced and the masks can be uniformly cleaned.