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Summary:PURPOSE:In hydrolyzing an metal alkoxide in an organic solvent to give a hydroxide, polymerizing it under heating, to form the titled film free from pinholes on a substrate, by using a metal salt of carboxylic acid as a catalyst for the hydrolysis and polymerization. CONSTITUTION:A metal alkoxide and a given amount of a metal salt of carboxylic acid as a catalyst for hydrolysis and polymerization are added to an organic solvent, blended with stirring. This blended solution is applied to a substrate, and heated to form a coated film of oxide. Consequently, the metal alkoxide is rapidly hydrolyzed by a catalytic action in the organic solvent to give a hydroxide, which is polymerized under heating with the same catalyst to form easily a film of oxide.
Bibliography:Application Number: JP19830073926