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Summary:PURPOSE:To form a good temperature contrast in a medium by improving a reflection factor by using a part by which an illuminating luminous flux is reflected, as a common conductive reflecting film of each resistor, and also placing the conductive film between the resistor being a heating element and the medium. CONSTITUTION:Each independent electrode 12a-12d exposes its upper part and is embedded in an insulator 15 so as to become a protective layer of each electrode. An insulator 14 is formed on the upper part of the insulator 15, and in this insulator 14, resistors 11a-11d which becomes heaters (heating elements) expose the upper part and the lower part and are embedded. A metallic film 13 being a conductive reflecting film, which contacts with the upper face of the resistors 11a-11d and becomes a common electrode is formed on the upper face of the insulator 14. Also, a medium 16 whose refractive index has a temperature dependability is formed so as to cover the metallic film 13. A luminous flux which is made incident to the medium is modulated by selecting one of the resistors, heating the resistor by applying a voltage signal, and making a refractive index in the medium ununiform. A utilization factor of light is improved by the common conductive reflecting film, and an S/N ratio is improved by a flat reflecting surface.
Bibliography:Application Number: JP19830067712