THIN FILM PHOTODETECTOR

• Main Authors: OZAWA TAKASHI, ITOU HISAO, FUSE MARIO, NAKAMURA TAKESHI, HAMANO TOSHIHISA, TAKENOUCHI MUTSUO
• Format: Patent
• Language: English
• Published: 19.11.1983
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES

PURPOSE:To improve the uniformity of the properties of each photodetector by narrowing the widths of the direction perpendicular to the direction that the end of a common electrode varies of the leading part of a divided electrode, thereby reducing the irregularity of the crossing area between the electrodes. CONSTITUTION:A plurality of divided electrodes 20 which are formed of a square electrode 22 which has a width LA forming a photodetector and a leading electrode 21 which has a vertical width LB to the direction that varies at the end of a common electrode 14, and an electrode 12 of substantially U-shape for leading the other electrode are formed on a substrate 11. A photoelectric conversion film 13 is formed on the electrode 20. The electrode 21 is formed in the width less than LB of the half of the width LA of the electrode 22. In this manner, even if the positions of the ends of the electrode 14 are irregularly aligned, the resolution, variation and irregularity of the photodetector can be reduced.