XY TABLE

• Main Authors: KASHIMA NORIYASU, SUEMATSU MUTSUMI, SUZUKI NOBUSHI, WATANABE TAKAO, TSURUTA TOSHIROU
• Format: Patent
• Language: English
• Published: 03.02.1983
• Subjects: COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONTROLLING; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TRANSPORTING

PURPOSE:To drive X and Y direction moving tables quickly and higly accurately by linear motors. CONSTITUTION:When current is made to flow into a linear motor 4, an X direction moving table 2 on an XY table moves on a table supporting board 1 in the X direction. At the same time, a Y direction moving table 3 on the X direction moving table 2 moves in the X direction. The Y direction moving table is slid along a blacket 9 fixed on a linear motor 5. When current is made to flow into the linear motor 5, the Y direction moving table moves on the X direction moving table 2 in the Y direction. Consequently the XY table can be moved in an optional direction by simultaneously driving these linear motors 4, 5.