MANUFACTURE OF SEMICONDUCTOR DEVICE

• Main Author: MIZUSHIMA KAZUYUKI
• Format: Patent
• Language: English
• Published: 28.10.1983
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE:To connect between a lower layer wiring and an upper layer wiring with a wiring material buried in a through hole, to enhance yield of a wiring system, and moreover to hold the upper part of the through hole flat by a method wherein the PR process is supplemented by one process per one wirin...