THIN FILM TYPE SOLID-STATE X-RAY SENSOR

• Main Authors: FUSE MARIO, TAKENOUCHI MUTSUO
• Format: Patent
• Language: English
• Published: 16.08.1983
• Subjects: BASIC ELECTRIC ELEMENTS; DIAGNOSIS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HUMAN NECESSITIES; HYGIENE; IDENTIFICATION; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; MEDICAL OR VETERINARY SCIENCE; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES; SURGERY; TESTING

PURPOSE:To make an X-ray sensor small-sized and high-sensitivity, by laminating an upper electrode, a photoconductor layer, a transparent electrode layer, and a phosphor layer in order to constitute the X-ray sensor. CONSTITUTION:The X-ray sensor consists of a light intercepting supporting material 6, a phosphor layer 5 formed on the supporting material 6, a transparent electrode layer 4 laminated on the layer 5, a photoconductor layer 2 formed on the layer 4, and a light intercepting upper electrode 1 laminated on the layer 2. Most of an X-ray beam 13 incident from the upper electrode 1 is transmitted through the photoconductor layer 2 and the transparent electrode layer 4 and reaches the phosphor layer 5 of the lowest layer. The fluorescence emitted from the phosphor layer 5 is absorbed by the photoconductor layer 2, and electron-positive hole pairs are generated in the layer 2. When an electric field is applied across the upper electrode 1 and the transparent electrode layer 4, a photocurrent is taken out easily to the external.