TREATING DEVICE FOR INSIDE SURFACE OF PIPE
PURPOSE:To perform uniform sputtering by forming a titled device in such a way that the inside wall of a pipe to be treated is exposed to the inside of a vacuum vessel, disposing a target of a cylindrical shape at the central axis of the pipe to be treated, and providing an etching gun which turns a...
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Main Author | |
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Format | Patent |
Language | English |
Published |
13.08.1983
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Subjects | |
Online Access | Get full text |
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