RADIATION SENSOR AND SENSOR ARRAY

• Main Authors: FUSE MARIO, TAKENOUCHI MUTSUO
• Format: Patent
• Language: English
• Published: 13.07.1983
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PURPOSE:To obtain a high-density arranyed (array type) radiation sensor by providing numerous band-shaped electrodes on one surface of a radiation photosensitive body and an opposite electrode in such a manner as to form a photosensitive section overlapping the band-shaped electrodes on the other surface thereof. CONSTITUTION:An X ray sensitive body 12 is provided over numerous band- shaped electrodes 11 formed on one surface of a substrate 10 and an opposite electrode 13 thereon 12. Photosensitive sections 14-1-14-n are formed at the overlapped section between the band-shaped electrode 11 and the opposite electrode 13. A Cr-Au thin film formed on a highly smooth glass substrate 10 is worked by a well-accepted means to make the band-shaped electrodes 11, on which an X ray sensitive material such as Se thin film is formed by evaporation at a thickness of 10-100mum. An X ray transmitting metal electrode layer such as thin film of Al, Ag, Be or the like is formed on a Se-As this film 12 by evaporation or sputtering to make an opposing electrode 13.