SCANNING TYPE ELECTRON MICROSCOPE AND ITS SIMILAR DEVICE

PURPOSE:To always obtain a high quality sample picture by providing an electromagnetic objective lens with its central point between the upper and lower poles and arranging the sample near the central point of this lens. CONSTITUTION:An electromagnetic objective lens 1 is provided at the lower part...

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Bibliographic Details
Main Author YAMAZAKI SHIGETOMO
Format Patent
LanguageEnglish
Published 08.09.1982
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:PURPOSE:To always obtain a high quality sample picture by providing an electromagnetic objective lens with its central point between the upper and lower poles and arranging the sample near the central point of this lens. CONSTITUTION:An electromagnetic objective lens 1 is provided at the lower part in a mirror cylinder and is configured as a lens whose central point G exists between the upper and lower poles 2 and 3. A hole 3a which passes a sample 4 and its bench is formed at the lower pole 3 of this objective lengs 1. Thus the sample 4 can be arranged near the central point G of the lens. Besides, a magnetic pole flap 5 which is screwed into the hole 3a of the lower pole 3 is provided and has a hole 5a with a smaller diameter than that of the hole 3a. The secondary electrons emitted from the sample 4 are detected by the upper and lower detectors 10 and 9 and the brightness of a cathode-ray tube is modulated by their detection signals.
Bibliography:Application Number: JP19810030266